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Clean Room Particle Monitoring System
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본 시스템은 소형, 경량인 Laser Particle Sensor(LPS), 분배기, Interface Box,
온습도 센서로 구성되어 집니다.
전용 Software는 Windows가 제공하는 Multi-task,
Multi-window 및 Network를 최대한 이용하여 계측 Data를 화면, Printer, File 상에 나타내도록 설계한 Program입니다.
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Monitoring System 특징 |
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- Compact Laser Particle Sensor(LPS)
- Multi-function, user-friendly monitoring software
- Reduced piping & wiring by the used of compact pump unit
paired with LPS
- Interface unit for environmental sensor such as
temperature/Humidity sensor differential pressure sensor. |
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Monitoring Software 특징 |
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By The maximum use Windows OS functions such as multi-task, multi-window and
network environment, this software is capatable to display, print download
the measurement data from any given sensor.
- Map display for real-time monitoring
of cleanroom conditions
- Windows version
- Compliance with multiple sensors
- Class judgement according to Federal
standard 209E/JIS B 9902
- Sensor maintenance data storage
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Hardware Requirement |
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| CPU |
Pentium II 300MHz 이상 |
| RAM |
64MB 이상 |
| Hard Disk |
4.3GB 이상 |
| LAN |
Correspond to 100BASE-TX/10BASE-T |
| OS |
Windows 95/98. NT. XP |
Lase Particle Sensor (Model 3714/3715)
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모델 |
3714 |
3715 |
| Particle Size |
0.3/0.5㎛ |
0.5/5.0㎛ |
| Flow Rate |
0.1CFM(2.83 Liter/min) |
| Concentration Range |
0-1,000,000 particles/cf |
| Flow Control |
Sonic Nozzle |
| Light Source |
780nm Laser Diode |
| Measuring Accuracy |
± 10% of reading |
| Interface |
RS-485 |
| Power Supply |
Supplied from the distributer |
| Dimension & weight |
72 x 126 x 40mm, 450g |
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8-chs Distributer (Model 3770)
Similar to old type multiplexer, this unit supplies
power to maximum 8 numbers of sensors.
모델 |
3770 |
| Input |
8 channels of RS-485 from the sensors |
| Interface |
Baud Rate : 4800/9600/19200bps |
| Power |
AC 85-132V/170-264V |
| Dimension |
300 x 100 x 200mm |
| Weight |
3Kg |
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Interface Box and TH Sensor |
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This unit is the 4-20mA signal to RS-485 output.
Electricla power is supplied through RS-485 cable.
Th sensor is a combined unit of temperature and
relative humidity sensor and outputs power is supplied
from interface box.
This independent probe type sensor can be handheld or
placed at some specific point of the measurement. |
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Interface Box Specification
| Model |
3772-01(Model 0841 TH sensor)
3772-02(4-20mA/0-1V/1-5V) |
| Input |
4-20mA/0-1V/1-5V Analog) |
| Output |
RS-485 |
| Power |
Supplied from distributer |
| Dimension |
140 x 80 x 40 |
| Weight |
500g |
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TH Sensor Specification
| Measuring |
Temperature : 0-50℃ |
| Range |
Humidity : 0-100%RH |
| Accuracy |
Temperature : ± 0.5℃ |
| Humidity : ± 2-5%RH |
| Power |
Supplied from 3772-01 |
| Output |
4-20mA |
| Connector |
10 pins circular connector |
| Configuration |
| Dimension |
φ20 x 235mm |
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